Beilstein J. Nanotechnol.2018,9, 1282–1287, doi:10.3762/bjnano.9.120
process and the potential for EBID as a scalable fabrication technique that could have a transformative effect on the athermal deposition of materials.
Keywords: boron oxide; diffusionandgrowth; electron beam-induced deposition; surface reactions; trimethyl borate; Introduction
Applications for boron
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Figure 1:
The EBID process and instrumentation. (a) Gaseous TMB precursor is admitted into the vacuum chamber...